language en
Latest version:
[Ontology URI]
Download serialization:
JSON-LD RDF/XML N-Triples TTL
License:
http://insertlicenseURIhere.example.org
Visualization:
Visualize with WebVowl
Provenance of this page
Ontology Specification Draft

Abstract

This is a placeholder text for the abstract. The abstract should contain a couple of sentences summarizing the ontology and its purpose.

Introduction back to ToC

This is a place holder text for the introduction. The introduction should briefly describe the ontology, its motivation, state of the art and goals.

Namespace declarations

Table 1: Namespaces used in the document
[Ontology NS Prefix]<http://www.w3id.org/ecsel-dr-SO#>
ecsel-dr<http://www.w3id.org/ecsel-dr#>
error<http://org.semanticweb.owlapi/error#>
owl<http://www.w3.org/2002/07/owl#>
rdf<http://www.w3.org/1999/02/22-rdf-syntax-ns#>
rdfs<http://www.w3.org/2000/01/rdf-schema#>
xml<http://www.w3.org/XML/1998/namespace>
xsd<http://www.w3.org/2001/XMLSchema#>

[Ontology Name]: Overview back to ToC

This ontology has the following classes and properties.

Classes

Object Properties

Data Properties

[Ontology Name]: Description back to ToC

This is a placeholder text for the description of your ontology. The description should include an explanation and a diagram explaining how the classes are related, examples of usage, etc.

Cross-reference for [Ontology Name] classes, object properties and data properties back to ToC

This section provides details for each class and property defined by [Ontology Name].

Classes

Bottleneckc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Bottleneck

A capacity Bottleneck is defined as an equipment or multiple equipment that reflect the capacity of the whole line (either a dedicated Line or Pool sharing).
has super-classes
semiconductor production lobe c
is in domain of
equipment group ID dp, is bottleneck of op, product level 3 pseudonym dp
is in range of
has bottleneck op

Capacityc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Capacity

As soon as a machine has free capacity: 1. all lots which belong to a priority class have to be dispatched imediately accordung to their priority rank.
has super-classes
semiconductor production lobe c
is in domain of
has WIP station op

Chemical Polishingc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Chemical_Polishing

The chemical polishing process or chemical mechanical planarization (CMP) is a process whereby a chemical reaction increases the mechanical removal rate of a material. CMP is commonly used to polish off high spots on wafers or films deposited on wafers, flattening the film or wafer, referred to as planarization. The chemical reaction that increases the mechanical removal rate is commonly tailored to provide a higher removal rate of one material versus another material. The chemical action in CMP helps to achieve higher selectivity's of one material to another than a strictly mechanical process would provide.
has super-classes
Workshop c

Current Work In Progressc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Current_WIP

“Current WIP” entity describes the actual material distribution in the supply chain. (snapshot entity)
has super-classes
semiconductor development lobe c
is in domain of
equipment group ID dp, is current WIP op, lot ID dp, residual time in fab dp
is in range of
has a current WIP op

Cycle Time Commitmentc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Cycle_Time_Committment

The “Cycle Time Commitment” entity helps controlling the WIP via the release plan. (strategy entity)
has super-classes
semiconductor development lobe c
is in domain of
cycle time commitment ID dp, cycle time committment dp, product level 3 pseudonym dp

Delivery Commitmentc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Delivery_Commitment

The "Delivery Commitment" directly corresponds to the release plans and cycle time commitments introduced in the corresponding entities.
has super-classes
semiconductor development lobe c
is in domain of
delivery commitment ID dp, has release plan op, is delivery commitment of op, product level 3 pseudonym dp, units per time period dp
is in range of
has delivery commitment op

Demand Snapshotc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Demand_Snapshot

The “Demand” entity stores redundant demand at every product level. (snapshot entity)
has super-classes
semiconductor production lobe c
is in domain of
customer wish time dp, demand due date dp, demand quantity dp, demand type dp, fab pseudonym dp, product level 3 pseudonym dp
is in range of
has demand op

Depositionc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Deposition

The deposition process, or chemical vapor deposition (CVD) is a process whereby a fiolm is deposited by reacting chemicals together in the gaseous or vapor phase to form a film. The gases or vapors utilized for CVD are compounds that contain the element to be deposited and that may be inducted to react with a substrate or other gas(es) to deposit a film. The CVD reactoin may be thermally activated, plasma induced, plasma enhanced CVD or activated by light in photon induced CVD.
has super-classes
Workshop c

Developmentc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Development

These lots have the same maxium waiting time as standard lots, however they are put before the standard lots.
has super-classes
Priority Class c
is in domain of
development timeout dp

Diffusionc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Diffusion

Diffusion is a process whereby a substance redistributes from an area of relatively high concentration to an area of relatively low concentration due to random thermal motion. The larger the concentration gradient the faster diffusion occurs for a given temperature, conversely, the higher the temperature the faster diffusion occurs for a given concentration gradient.
has super-classes
Workshop c

Dry Etchingc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Dry_Etching

Dry etching is a process whereby etching is accomplished by a reactive gas as opposed to a liquid. Dry etching techniques include plasma etch, reactive ion etch, magnetically enhanced reactive ion etch, inductively coupled plasma, electron spin resonance, etc.
has super-classes
Workshop c

EPAc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#EPA

The EPA is a product identifier referring to the associated process.
has super-classes
semiconductor development lobe c
is in domain of
has owner op, has priority class op, is dedicated to tool op, is processed by op
is in range of
is priority class of op

Equipmentc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Equipment

The entity “Equipment” describes the semiconductor equipment of any equipment model. It allocates it to higher level entities and describes the behavior of the equipment. (master entity)
has super-classes
semiconductor development lobe c
is in range of
has equipment op

Equipment Groupc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Equipment_Group

Each machine is allocated to a group of machines doing similar processes. The equipment groups are described and allocated in the master entity “Equipment Group”. (master entity)
has super-classes
semiconductor development lobe c
is in domain of
equipment group ID dp, equipment group type dp, fab pseudonym dp, has shift op, max throughput per week dp, number of parallel tools dp, shift ID dp
is in range of
has equipment group op

Event Calendarc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Event_Calendar

In the “Event Calendar” tracing entity, certain events like planned facility shutdowns, etc. can be scheduled
has super-classes
semiconductor development lobe c
is in domain of
capacity loss dp, event calendar type dp, fab pseudonym dp, mean time to failure dp, mean time to failure distribution dp, mean time to repair dp, mean time to repair distribution dp
is in range of
has event calendar op

Fabricationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Fab

The “Fab” entity depicts the fab as a technological and physical production unit. (master entity)
has super-classes
semiconductor production lobe c
is in domain of
fab internal dp, fab pseudonym dp, fab type dp, max WIP dp, plant ID dp
is in range of
has fab op

Furnacec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Furnace

Each furnace consists of two chambers with one tool in each chamber.
has super-classes
Tool c

Furnace Processc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Furnace_Process

Sequence of interdependent and linked procedures which, at every stage, consume one or more resources (employee time, energy, machines, money) to convert inputs (data, material, parts, etc.) into outputs. These outputs then serve as inputs for the next stage until a known goal or end result is reached.
has super-classes
semiconductor production lobe c
has sub-classes
Tempering c
is in range of
belongs to furnace process op

Hotc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Hot

These lots are processed after a certain maximum waiting time which is shorter than the maximum waiting time of standard lots. In general, for all classes, if there is more than one product type waiting.
has super-classes
Priority Class c
is in domain of
hot timeout dp

Implantationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Implantation

Implantation or Ion Implantation is a technique where ions are accelerated to a higher energy and speed an injected into a semiconductor. The dominant techniques for introducing dopants into a semiconductor.
has super-classes
Workshop c

Lithographyc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Lithography

The lithography process is the key process in frontend. This consists of the following steps: a photo resisting layer is spun on a wafer, then exposed through the mask, then developed, then showing the effect on the open places, and then final deletion of the photo resisting material leaves only the remaining structure on the water. after some time for deposition, these steps are repeated up to 35 times.
has super-classes
Workshop c
is in range of
requires op

Lotc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Lot

The Lot represents manufacturing unit (e.g. in the semicondutor industry in Frontend this often consists of 25 or 50 wafers).
has super-classes
semiconductor production lobe c
is in domain of
enter state dp, leave state dp, lot ID dp, lot due date dp, lot owner dp, lot size amount dp, priority dp, product level 3 dp, product level 3 pseudonym dp, route position dp
is in range of
has lot op

Lot Eventc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Lot_Event

The Lot Event tracing entity gives the history of lot events. e.g. Hold events, Split events, Merge events, etc. (tracing entities).
has super-classes
semiconductor production lobe c
is in domain of
enter main quantity dp, enter state dp, event date dp, event name dp, has lot op, leave main quantity dp, leave state dp, lot ID dp, lot owner dp, lot size amount dp, parent lot event dp, priority dp, product level 3 dp, product level 3 pseudonym dp, route position dp
is in range of
has lot event op

Lot Sizec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Lot_Size

A measure or quantity increment acceptable to or specified by the party offering to buy or sell. Used also as an alternative term for lot quantity.
has super-classes
semiconductor production lobe c
is in domain of
equipment group ID dp, fab pseudonym dp, lot size quantity dp, product level 3 pseudonym dp
is in range of
has lot size op

Maskc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Mask

A transparent (glass or quartz) plate covered with an array of patterns used in making an IC. Each pattern consists of opaque and transparent areas that define the size and shape of all circuit and device elements. The mask is used to expose selected areas, and defines the areas to be processed. Masks may use emulsion, chrome, iron oxide, silicon or other material to produce the opaque areas.
has super-classes
semiconductor development lobe c
is in domain of
requires op

Material Transfer Matrixc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Material_Transfer_Matrix

A material transfer matrix estimates the duration of material from on to another equipment.
has super-classes
semiconductor development lobe c
is in domain of
equipment group ID dp, to equipment group ID dp, transfer mode dp, transfer time dp

Operationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Operation

The master entity “Operation” depicts the generic behavior of a single process step. Each operation has a foreign key relation to equipment and to route which means that the operation is required by the specific routes and requires a specific equipment. (workflow descriptive master entity)
has super-classes
semiconductor development lobe c
is in domain of
equipment group ID dp, has equipment op, has technology op, has time constraints op, operation ID dp, operation critical dp, operation name dp, p time per unit dp, processing time distribution dp, product level 3 pseudonym dp, rework operation dp, rework probability lots dp, rework probability wafers dp, rework test dp, sampling rate dp, scrapping probability lots dp, scrapping probability wafers dp, scrapping test dp, split lot chips dp, split lots dp, unit dp, variance p time dp
is in range of
has operation op

Operatorc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Operator

A user that interacts with the equipment only to the degree necessary for the equipment to perform its intended function.
has super-classes
semiconductor development lobe c
is in domain of
is responsible for op, load time wait dp, manually loads op, unloads op

Ownerc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Owner

An owner is the entity that has the highest level of access authority or legal right to a system or equipment.
has super-classes
semiconductor development lobe c
is in range of
has owner op

Planning Work Centerc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Planning_Work_Center

Semiconductor wafers arrive at the planning work center according to a Poisson process in lots with a certain unit size. The planning work center X48- can process three different products which arrive in four different classes.
has super-classes
semiconductor development lobe c
is in domain of
belongs to furnace process op, consists of tool op
is in range of
is responsible for op

Plantc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Plant

The “Plant” entity describes the plant as a physical location of one or more fabs. The Plant belongs to a supply chain and can either be internal or external. (master entity)
has super-classes
semiconductor development lobe c
is in domain of
plant internal dp, plant name dp
is in range of
has plant op

Priority Classc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Priority_Class

Each lot is characterized by a product type and a priority class. The priority classes are listed as follows: development, hot, productive, rocket and timecoupling.
has super-classes
semiconductor production lobe c
has sub-classes
Development c, Hot c, Productive c, Rocket c, Time Coupling c
is in domain of
is priority class of op
is in range of
has priority class op

Processc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Process

Sequence of interdependent and linked procedures which, at every stage, consume one or more resources (employee time, energy, machines, money) to convert inputs (data, material, parts, etc.) into outputs. These outputs then serve as inputs for the next stage until a known goal or end result is reached.
has super-classes
semiconductor development lobe c
has sub-classes
Process Class c, Process Flow c, Process Group c, Process Line c
is in domain of
uses one or more technology op

Process Classc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Process_Class

A Process Class is the second hierarchy level in the Technology Catalogue and is a subset of top hierarchy level "Technology Class". A Process Class is defined by the device category and its generation or wafer diameter.
has super-classes
Process c

Process Flowc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Process_Flow

A wafer technology is defined as a manufacturing process flow on wafer level including wafer test and pre-assembly which creates one device (discrete technology) or a set of different devices (IC technology) to be used in a product.
has super-classes
Process c
is in domain of
has product number op

Process Groupc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Process_Group

A Process Group is the third hierarchy level in the Technology Catalogue and a subset of the Process Class. A Process Group is defined by the device type and its generation (eventually voltage class) or wafer diameter
has super-classes
Process c

Process Linec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Process_Line

A Process Line is the forth hierarchy level in the Technology Catalogue and is a subset of Process Group. A Process Line is defined by WHAT is produced in detail
has super-classes
Process c

Productc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product

A product is a work product that is delivered to the customer.
has super-classes
semiconductor production lobe c
has sub-classes
Product Class c, Product Group c, Product Line c, Product Number c
is in domain of
has demand op, has operation op

Product Classc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Class

the product class is an entity used for planning and reporting. This helps create stable brand/name architectures to enable highest possible product portfolio transparency, true value creation ad to prevent from product TM overload.
has super-classes
Product c

Product Groupc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Group

A (main) product group is a grouping of products for calculation or sales purposes. The scope includes finished and unfinished products of one product line.
has super-classes
Product c

Product Levelc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Level

In the "product level" entity, the aggregation of elements enables the grouping of products and defines the relationship between products and groups at different hierarchy levels. This supports planning, logistics, modeling, forecasting and reporting.
has super-classes
semiconductor development lobe c
has sub-classes
Product Level 2 c, Product Level 3 c
is in range of
has product level op

Product Level 2c back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Level_2

The product levels 3 to 1 are aggregated levels that are based on information from product level 4. (hierarchal aggregation level)
has super-classes
Product Level c
is in domain of
product level 2 ID dp, technology ID dp

Product Level 3c back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Level_3

The static bottlenecks are determined in the “Product Level 3” master entity because the mid capacity planning is done on this first aggregated product level. There is no big difference in capacity from the aggregated level 3 product to its child level 4 products. (hierarchal aggregation level)
has super-classes
Product Level c
is in domain of
chips per wafer dp, has route op, product level 2 ID dp, product level 3 pseudonym dp, route name dp

Product Linec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Line

The product line is one of the most prominent grouping of products. It is used in reporting as well as for structuring organizations.
has super-classes
Product c

Product Numberc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Product_Number

The product number is a unique identifier of a product. The scope is limited to finished products only.
has super-classes
Product c
is in range of
has product number op

Production Requestc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Production_Request

Production requests definte what the facilities need to produce when and in what quantity.
has super-classes
semiconductor production lobe c
is in range of
has demand op

Productivec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Productive

The standard lots, also referred to as Productive (Prod) lots, are the most common lot type and have no priority.
has super-classes
Priority Class c

Purgec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Purge

purge' is the application of an intert gas, or gas mixture, to the OD or ID surface of the weld joint to displace non-inert atmospheric gases. A block purge is a non-flowing purge with positive pressure.
has super-classes
semiconductor production lobe c
is in domain of
purge duration dp
is in range of
needs purge op

Release Planc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Release_Plan

The “Release Plan” entity shows the quantity planned to be released to a fab or facility. (strategy entity)
has super-classes
semiconductor production lobe c
is in domain of
fab pseudonym dp, has delivery commitment op, product level 3 pseudonym dp, release plan ID dp, units per time period dp
is in range of
has release plan op, is delivery commitment of op

Robotc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Robot

The robot loads and unloads the lots from the WIP station into the furnace. Robot can load the furnace while another boat is processd by the tool.
has super-classes
semiconductor production lobe c
is in domain of
robotically loads op

Rocketc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Rocket

Rocket lots are processed immediately if a machine has free capacity. The remaining furnace space is then filled up with lots of the same product.
has super-classes
Priority Class c

Routec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Route

The master entity “Route” describes the structure of a workflow out of operations. Every product uses a specific route in its value stream, i.e. the complete sequence of operations with all mandatory and optional operations necessary to complete the product. A route makes use of the single operations. (workflow descriptive master entity)
has super-classes
semiconductor production lobe c
is in domain of
operation ID dp, product level 3 pseudonym dp, route name dp, sequence number dp
is in range of
has route op

Shiftc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Shift

Each workshop has a certain technical and operational workforce organized in shifts described in the “Shift” entity.
has super-classes
semiconductor production lobe c
is in domain of
shift ID dp, workforce dp
is in range of
has shift op

Simulation Partc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Simulation_Part

A simulation part helps to identify the same product in different locations. They are visible in Product Structures. This is a simulation entity and not a form of production/planning.
has super-classes
semiconductor production lobe c
is in range of
has part op

Simulation Routec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Simulation_Route

A simulation route (AKA workroute) represents a sequence of process steps in manufacutring (mainly at wafer fab). This is a simulation entity and not a form of production/planning.
has super-classes
semiconductor production lobe c
is in range of
has route op

Sputteringc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Sputtering

The sputtering process, or physical vapor deposition (PVD) is the most used layering process today. Here gas atoms, mostly argon, strike out atoms from the cathode I an electric field which then form a thin film on the wafer surface.
has super-classes
Workshop c

Supply Chainc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Supply_Chain

The entity “Supply Chain” describes the supply chain from the topmost level with all possible material flow edges, referring on the FabIDs (master entity)
has super-classes
semiconductor production lobe c
is in domain of
from fab ID dp, has plant op, supply chain name dp, to fab ID dp, travel time dp

Target Costsc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Target_Costs

The target costs entity is the final cost of a product or service that must be achieved in order to generate the desired level of sales revenue and income or due to contractual agreements.
has super-classes
semiconductor production lobe c
is in domain of
WIP costs per unit and time unit dp, finished product costs dp, technology ID dp
is in range of
has target costs op

Target Revenuec back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Target_Revenue

The target revenue is the amount of income a company wants to generate for the current accounting period.
has super-classes
semiconductor development lobe c
is in domain of
revenue per unit dp, technology ID dp
is in range of
has target revenue op

Target Service Levelc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Target_Service_Level

The target service level is a performance indicator expressing the percentage of orders satisfied.
has super-classes
semiconductor development lobe c
is in domain of
fill rate dp, stock out probability dp, target service level beta dp, technology ID dp

Technologyc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Technology

A semiconductor technology is a set of equipment, processes, manufacturing techniques and the related methods and procedures to enable the design & production of components, sub-components and modules.
has super-classes
Technology c, semiconductor development lobe c
has sub-classes
Technology c
is in domain of
supply chain ID dp, technology ID dp
is in range of
has technology op

Temperingc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Tempering

The tempering process is a type of heat treatment applied by the furnace. The process has the effect of toughening by lessing brittleness and reducing internal stresses.
has super-classes
Furnace Process c

Time Constraintsc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Time_Constraints

As single operations can set the lot to a time-critical state, time constraints can ensure that the operation setting it to an uncritical state is not delayed. Also the other case where certain time has to be spent between two operations can be covered with this master entity. (workflow deswcriptive master entities)
has super-classes
semiconductor development lobe c
is in range of
has time constraints op

Time Couplingc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Time_Coupling

Lots of this type are requested by the next machine in the production line in irregular intervals. Special chemical characteristics require the lot being further processed immediately after the furnace operation. Thus, the downstram machines keep capacity free for the resulting time slot. timecoupling can be turned on or off. if it is on all lots are processed no matter how many are waiting and if not they wait.
has super-classes
Priority Class c
is in domain of
frequency dp, number of products dp
is in range of
is preceeded by op

Toolc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Tool

A tool is any pieve of semiconductor fabrication or inspection equipment designed to process wafers. Often used synonymously with equipment in the silicon wafer processing industry.
has super-classes
semiconductor development lobe c
has sub-classes
Furnace c
is in domain of
has equipment op, is preceeded by op, mean time off line dp, needs purge op, robot loading time dp, robot unloading time dp, tool availability dp
is in range of
consists of tool op, is dedicated to tool op, is processed by op, robotically loads op, unloads op

Wet Etchingc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Wet_Etching

Wet Etching is the process of removing material-etching, through the use of chemical activity.
has super-classes
Workshop c

Work In Progress Stationc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Work_In_Progress_Station

Work in Progress (WIP) processing occurs here. WIP refers to the units of production that have been released into the factory, but have not yet been scrapped, have not been sent our for external rework, and have not finished processing through all of the production steps.
has super-classes
semiconductor production lobe c
is in range of
has WIP station op, manually loads op

Workshopc back to ToC or Class ToC

IRI: http://www.w3id.org/ecsel-dr-SO#Workshop

The overall organizational working structures within the fabs is described in the entity “Workshop” (master entity)
has super-classes
semiconductor development lobe c
has sub-classes
Chemical Polishing c, Deposition c, Diffusion c, Dry Etching c, Implantation c, Lithography c, Sputtering c, Wet Etching c
is in range of
has workshop op, uses one or more technology op

Object Properties

belongs to furnace processop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#belongs_to_furnace_process

has domain
Planning Work Center c
has range
Furnace Process c

consists of toolop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#consists_of_tool

has domain
Planning Work Center c
has range
Tool c

dedicates epaop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#dedicates_epa

is inverse of
is dedicated to tool op

has a current WIPop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_current_WIP

has domain
error385 c
has range
Current Work In Progress c
is inverse of
is current WIP op

has bottleneckop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_bottleneck

has range
Bottleneck c
is inverse of
is bottleneck of op

has delivery commitmentop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_delivery_commitment

has domain
Release Plan c
has range
Delivery Commitment c
is inverse of
is delivery commitment of op

has demandop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_demand

has domain
error390 c
Product c
has range
Demand Snapshot c
Production Request c
is inverse of
is demand of op

has equipmentop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_equipment

has domain
Operation c
Tool c
has range
Equipment c
is inverse of
is equipment of op

has equipment groupop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_equipment_group

has domain
error380 c
has range
Equipment Group c
is inverse of
is equipment group of op

has event calendarop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_event_calendar

has domain
error381 c
has range
Event Calendar c
is inverse of
is event calendar of op

has fabop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_fab

has domain
error379 c
has range
Fabrication c
is inverse of
is fab of op

has lotop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_lot

has domain
Lot Event c
has range
Lot c
is inverse of
is lot of op

has lot eventop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_lot_event

has domain
error378 c
has range
Lot Event c
is inverse of
is lot event of op

has lot sizeop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_lot_size

has domain
error388 c
has range
Lot Size c
is inverse of
is lot size of op

has operationop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_operation

has domain
error387 c
Product c
has range
Operation c
is inverse of
is operation of op

has ownerop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_owner

has domain
EPA c
has range
Owner c
is inverse of
is owned by op

has partop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_part_simulation_part

has domain
error391 c
has range
Simulation Part c
is inverse of
is part of op

has plantop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_plant

has domain
Supply Chain c
has range
Plant c
is inverse of
is plant of op

has priority classop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_priority_class

has domain
EPA c
has range
Priority Class c
is inverse of
is priority class of op

has product levelop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_product_level

has domain
error389 c
has range
Product Level c
is inverse of
is product level of op

has product numberop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_product_number

has domain
Process Flow c
has range
Product Number c

has release planop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_release_plan

has domain
Delivery Commitment c
has range
Release Plan c
is inverse of
is release plan of op

has routeop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_route

has domain
error384 c
Product Level 3 c
has range
Route c
Simulation Route c
is inverse of
is route of op

has shiftop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_shift

has domain
Equipment Group c
has range
Shift c
is inverse of
is shift of op

has target costsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_target_costs

has domain
error383 c
has range
Target Costs c
is inverse of
is target costs of op

has target revenueop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_target_revenue

has domain
error386 c
has range
Target Revenue c
is inverse of
is target revenue of op

has technologyop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_technology

has domain
error392 c
Operation c
has range
Technology c
is inverse of
is technology of op

has time constraintsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_time_constraints

has domain
Operation c
has range
Time Constraints c
is inverse of
is time constraints of op

has WIP stationop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_WIP_station

has domain
Capacity c
has range
Work In Progress Station c
is inverse of
is WIP station of op

has workshopop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#has_workshop

has domain
error382 c
has range
Workshop c
is inverse of
is workshop of op

is bottleneck ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_bottleneck_of

has domain
Bottleneck c
is inverse of
has bottleneck op

is current WIPop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_current_WIP

has domain
Current Work In Progress c
has range
error377 c
is inverse of
has a current WIP op

is dedicated to toolop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_dedicated_to_tool

has domain
EPA c
has range
Tool c
is inverse of
dedicates epa op

is delivery commitment ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_delivery_commitment_of

has domain
Delivery Commitment c
has range
Release Plan c
is inverse of
has delivery commitment op

is demand ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_demand_of

is inverse of
has demand op

is equipment group ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_equipment_group_of

is inverse of
has equipment group op

is equipment ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_equipment_of

is inverse of
has equipment op

is event calendar ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_event_calendar_of

is inverse of
has event calendar op

is fab ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_fab_of

is inverse of
has fab op

is lot event ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_lot_event_of

is inverse of
has lot event op

is lot ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_lot_of

is inverse of
has lot op

is lot size ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_lot_size_of

is inverse of
has lot size op

is manually loaded byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_manually_loaded_by

is inverse of
manually loads op

is needed by toolop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_needed_by_tool

is inverse of
needs purge op

is operation ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_operation_of

is inverse of
has operation op

is owned byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_owned_by

is inverse of
has owner op

is part ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#simulation_part_is_part_of

is inverse of
has part op

is plant ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_plant_of

is inverse of
has plant op

is preceeded byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_preceeded_by

has domain
Tool c
has range
Time Coupling c
is inverse of
preceeds op

is priority class ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_priority_class_of

has domain
Priority Class c
has range
EPA c
is inverse of
has priority class op

is processed byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_processed_by_tool

has domain
EPA c
has range
Tool c
is inverse of
processes op

is product level ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_product_level_of

is inverse of
has product level op

is release plan ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_release_plan_of

is inverse of
has release plan op

is required byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_required_by

is inverse of
requires op

is responsible forop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_responsible_for_planning_work_center

has domain
Operator c
has range
Planning Work Center c

is robotically loaded byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_robotically_loaded_by

is inverse of
robotically loads op

is route ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_route_of

is inverse of
has route op

is shift ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_shift_of

is inverse of
has shift op

is target costs ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_target_costs_of

is inverse of
has target costs op

is target revenue ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_target_revenue_of

is inverse of
has target revenue op

is technology ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_technology_of

is inverse of
has technology op

is time constraints ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_time_constraints_of

is inverse of
has time constraints op

is unloaded byop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_unloaded_by

is inverse of
unloads op

is WIP station ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_WIP_station_of

is inverse of
has WIP station op

is workshop ofop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#is_workshop_of

is inverse of
has workshop op

manually loadsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#manually_loads

the operator will load the wafer into the wip station and then the robot will load the wafers from the wip station to the tool
has domain
Operator c
has range
Work In Progress Station c
is inverse of
is manually loaded by op

needs purgeop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#needs_purge

has domain
Tool c
has range
Purge c
is inverse of
is needed by tool op

preceedsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#preceeds

is inverse of
is preceeded by op

processesop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#processes

is inverse of
is processed by op

requiresop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#requires

has domain
Mask c
has range
Lithography c
is inverse of
is required by op

robotically loadsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#robotically_loads

the operator will load the wafer into the wip station and then the robot will load the wafers from the wip station to the tool
has domain
Robot c
has range
Tool c
is inverse of
is robotically loaded by op

unloadsop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#unloads

has domain
Operator c
has range
Tool c
is inverse of
is unloaded by op

uses one or more technologyop back to ToC or Object Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#uses_one_or_more_technology

has domain
Process c
has range
Workshop c

Data Properties

capacity lossdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#capacity_loss

Calendar: Facility capacity loss in percent
has domain
Event Calendar c
has range
double

chips per waferdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#chips_per_wafer

Product Level 4: Number of chips on a wafer
has domain
Product Level 3 c
has range
integer

customer wish timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#customer_wish_time

PK; customer wish time of the demand entry
has domain
Demand Snapshot c
has range
date time

cycle time commitment IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#cycle_time_commitment_ID

Cycle Time Commitment: FK; Name of the product level 3
has domain
Cycle Time Commitment c
has range
string

cycle time committmentdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#cycle_time_committment

Cycle Time Commitment: Committed overall supply chain cycle time
has domain
Cycle Time Commitment c
has range
date time

delivery commitment IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#delivery_commitment_ID

Delivery Commitment: FK; Name of the product level 3
has domain
Delivery Commitment c
has range
string

demand due datedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#demand_due_date

Demand: PK; Due Date of the demand entry
has domain
Demand Snapshot c
has range
date time

demand quantitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#demand_quantity

Demand: Demand amount
has domain
Demand Snapshot c
has range
integer

demand typedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#demand_type

Demand: PK; Demand forecast or real demand
has domain
Demand Snapshot c
has range
string

development timeoutdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#development_timeout

length of, or element of the length of, a temporal extent expressed in hours
has domain
Development c
has range
decimal

enter main quantitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#enter_main_quantity

Lot Event: Number of units in the lot (wafers / chips) when entered the event
has domain
Lot Event c
has range
integer

enter statedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#enter_state

Lot Event: Time state is entered
has domain
Lot c
Lot Event c
has range
date time

equipment group IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#equipment_group_ID

Current WIP: PK; FK; Name of Equipment Group
has domain
Bottleneck c
Current Work In Progress c
Equipment Group c
Lot Size c
Material Transfer Matrix c
Operation c
has range
string

equipment group typedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#equipment_group_type

Equipment Group: Refers to the technology used for the process tool: Lithography, Plasma Etching, Diffusion, Tester, Prober, etc.
has domain
Equipment Group c
has range
string

event calendar typedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#event_calendar_type

Event Calendar: Type of event
has domain
Event Calendar c
has range
string

event datedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#event_date

Lot Event: Date event occurred (DD.MM.YYYY hh:mm:ss)
has domain
Lot Event c
has range
date time

event namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#event_name

Lot Event: Name of event that occurred to lot (Hold, Split, Merge, Scrap, etc.)
has domain
Lot Event c
has range
string

fab internaldp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#fab_internal

Fab: Does the fab belong to the company or to an external partner
has domain
Fabrication c
has range
boolean

fab pseudonymdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#fab_pseudonym

Calendar: FK; Name of the facility
has domain
Demand Snapshot c
Equipment Group c
Event Calendar c
Fabrication c
Lot Size c
Release Plan c
has range
string

fab typedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#fab_type

Fab: Front End, Wafer Testing, Back End Assembly, Back End Final Test, …
has domain
Fabrication c
has range
string

fill ratedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#fill_rate

Target Service Level: Rate of demand that can be fulfilled
has domain
Target Service Level c
has range
double

finished product costsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#finished_product_costs

Target Costs: Costs of a finished unit of a certain technology
has domain
Target Costs c
has range
integer

frequencydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#frequency

has domain
Time Coupling c
has range
integer

from fab IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#from_fab_ID

Supply Chain: FK; Source ID of supply chain edge
has domain
Supply Chain c
has range
string

hot timeoutdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#hot_timeout

length of, or element of the length of, a temporal extent expressed in hours
has domain
Hot c
has range
decimal

leave main quantitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#leave_main_quantity

Lot Event: Number of units in the lot (wafers / chips) when left the event (Important for splits, merges and scraps)
has domain
Lot Event c
has range
integer

leave statedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#leave_state

Lot Event: Time state is finished
has domain
Lot c
Lot Event c
has range
date time

load time waitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#load_time_wait

length of, or element of the length of, a temporal extent expressed in hours
has domain
Operator c
has range
decimal

lot due datedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#lot_due_date

Lot Event: Date customer needs the lot delivered (DD.MM.YYYY hh:mm:ss)
has domain
Lot c
has range
date time

lot IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#lot_ID

Current WIP: PK; FK; Name of Lot
has domain
Current Work In Progress c
Lot c
Lot Event c
has range
string

lot ownerdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#lot_owner

has domain
Lot c
Lot Event c
has range
string

lot size amountdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#lot_size_amount

Lot Event: Amount of units in the lot
has domain
Lot c
Lot Event c
has range
integer

lot size quantitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#lot_size_quantity

Lot Size: Standard (FE) or optimal (BE) lot size for respective PL3
has domain
Lot Size c
has range
string

max throughput per weekdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#max_throughput_per_week

Maximum Throughput per week
has domain
Equipment Group c
has range
integer

max WIPdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#max_WIP

Fab: Hard capacity restriction of process units (NULL if no restriction)
has domain
Fabrication c
has range
integer

mean time off linedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#mean_time_off_line

length of, or element of the length of, a temporal extent expressed in hours
has domain
Tool c
has range
decimal

mean time to failuredp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#mean_time_to_failure

length of, or element of the length of, a temporal extent expressed in seconds
has domain
Event Calendar c
has range
decimal

mean time to failure distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#mean_time_to_failure_distribution

has domain
Event Calendar c
has range
string

mean time to repairdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#mean_time_to_repair

length of, or element of the length of, a temporal extent expressed in seconds
has domain
Event Calendar c
has range
decimal

mean time to repair distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#mean_time_to_repair_distribution

has domain
Event Calendar c
has range
string

number of parallel toolsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#number_of_parallel_tools

has domain
Equipment Group c
has range
integer

number of productsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#number_of_products

has domain
Time Coupling c
has range
integer

operation criticaldp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#operation_critical

Operation: Is the Operation critical in terms of SC planning (a Bottleneck) or not?
has domain
Operation c
has range
boolean

operation IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#operation_ID

FK; Name of operation
has domain
Operation c
Route c
has range
string

operation namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#operation_name

has domain
Operation c
has range
string

p time per unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#p_time_per_unit

Operation: Capacity consuming / relevant equipment processing time
has domain
Operation c
has range
decimal

parent lot eventdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#parent_lot_event

Lot Event: FK; Name of ancestor lot event (important to rebuild the lot history)
has domain
Lot Event c
has range
string

plant IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#plant_ID

Fab: FK; Geographical location
has domain
Fabrication c
has range
string

plant internaldp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#plant_internal

Plant: Does the plant belong to the company or to an external partner
has domain
Plant c
has range
boolean

plant namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#plant_name

Plant: Will generally refer to the geographical location of the plant
has domain
Plant c
has range
string

prioritydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#priority

Current WIP: Priority of the lot
has domain
Lot c
Lot Event c
has range
integer

processing time distributiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#processing_time_distribution

has domain
Operation c
has range
string

product level 2 IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#product_level_2_ID

Product Level 2: PK; Name of the product in level 2
has domain
Product Level 2 c
Product Level 3 c
has range
string

product level 3dp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#product_level_3

Lot Event: FK; Name of product level 3 lot belongs to
has domain
Lot c
Lot Event c
has range
string

product level 3 pseudonymdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#product_level_3_pseudonym

Demand: PK; Associated PL3
has domain
Bottleneck c
Cycle Time Commitment c
Delivery Commitment c
Demand Snapshot c
Lot c
Lot Event c
Lot Size c
Operation c
Product Level 3 c
Release Plan c
Route c
has range
string

purge durationdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#purge_duration

length of, or element of the length of, a temporal extent expressed in hours
has domain
Purge c
has range
decimal

release plan IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#release_plan_ID

Release Plan: FK; Name of the product level 3
has domain
Release Plan c
has range
string

residual time in fabdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#residual_time_in_fab

Current WIP: Expected residual time lot spends in current Fab (FE/BE)
has domain
Current Work In Progress c
has range
decimal

revenue per unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#revenue_per_unit

Target Revenue: Revenue per unit of a certain technology
has domain
Target Revenue c
has range
integer

rework operationdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#rework_operation

Operation: [FK] Rework Operation, if needed
has domain
Operation c
has range
string

rework probability lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#rework_probability_lots

Operation: Probability of rework-tested full lots to be reworked
has domain
Operation c
has range
double

rework probability wafersdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#rework_probability_wafers

Operation: Probability of rework-tested wafers to be reworked
has domain
Operation c
has range
double

rework testdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#rework_test

Operation: Are the processed lots tested for rework?
has domain
Operation c
has range
boolean

robot loading timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#robot_loading_time

length of, or element of the length of, a temporal extent expressed in hours
has domain
Tool c
has range
decimal

robot unloading timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#robot_unloading_time

length of, or element of the length of, a temporal extent expressed in hours
has domain
Tool c
has range
decimal

route namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#route_name

Name of route (usually equals product names requiring the route)
has domain
Product Level 3 c
Route c
has range
string

route positiondp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#route_position

Lot Event: FK; Sequential number of the operation lot has entered
has domain
Lot c
Lot Event c
has range
integer

sampling ratedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#sampling_rate

Sampling Rate: Execution rate of operation If operation is mandatory sampling rate is 1 (1- sampling rate = skipping rate of optional operation)
has domain
Operation c
has range
double

scrapping probability lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#scrapping_probability_lots

Operation: Probability of scrapping-tested full lots to be scrapped
has domain
Operation c
has range
double

scrapping probability wafersdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#scrapping_probability_wafers

Operation: Probability of scrapping-tested wafers to be scrapped
has domain
Operation c
has range
double

scrapping testdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#scrapping_test

Operation: Are the processed lots tested for scrapping?
has domain
Operation c
has range
boolean

sequence numberdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#sequence_number

Lot Event: FK; Sequential number of the operation lot has entered
has domain
Route c
has range
integer

shift IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#shift_ID

Shift: PK; Name of shift
has domain
Equipment Group c
Shift c
has range
string

split lot chipsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#split_lot_chips

split into lots with # chips, added due to data import
has domain
Operation c
has range
integer

split lotsdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#split_lots

Split into # lots, added due to data import
has domain
Operation c
has range
integer

stock out probabilitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#stock_out_probability

Target service level: Probability that customer demand cannot be fulfilled
has domain
Target Service Level c
has range
double

supply chain IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#supply_chain_ID

Technology: FK; Assignment of technology to supply chain
has domain
Technology c
has range
string

supply chain namedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#supply_chain_name

Supply Chain: Name of the supply chain
has domain
Supply Chain c
has range
string

target service level betadp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#target_service_level_beta

Target Service Level: Target beta service level (Rate of demand to be fulfilled without delay)
has domain
Target Service Level c
has range
double

technology IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#technology_ID

Target Costs: FK; Name of the technology
has domain
Product Level 2 c
Target Costs c
Target Revenue c
Target Service Level c
Technology c
has range
string

to equipment group IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#to_equipment_group_ID

Material Transfer: FK; target EquipmentGroup of transfer
has domain
Material Transfer Matrix c
has range
string

to fab IDdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#to_fab_ID

Supply Chain: FK; Sink ID of supply chain edge
has domain
Supply Chain c
has range
string

tool availabilitydp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#tool_availability

is tool available? boolean YES/NO
has domain
Tool c
has range
boolean

transfer modedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#transfer_mode

Transfer Mode: Automation, AGV, milkrun or manual
has domain
Material Transfer Matrix c
has range
string

transfer timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#transfer_time

Material Transfer: Duration of transfer from on to the other equipment
has domain
Material Transfer Matrix c
has range
decimal

travel timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#travel_time

length of, or element of the length of, a temporal extent expressed in seconds
has domain
Supply Chain c
has range
decimal

unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#unit

unit, added due to data import
has domain
Operation c
has range
string

units per time perioddp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#units_per_time_period

Delivery Commitment: Quantity of committed delivery per time period (time period depends on company planning process)
has domain
Delivery Commitment c
Release Plan c
has range
integer

variance p timedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#variance_p_time

Variance of capacity relevant operation processing time
has domain
Operation c
has range
decimal

WIP costs per unit and time unitdp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#WIP_costs_per_unit_and_time_unit

Target Costs: Capital bounding costs + Storage costs + Mean production costs of a unit of a certain technology and time unit
has domain
Target Costs c
has range
integer

workforcedp back to ToC or Data Property ToC

IRI: http://www.w3id.org/ecsel-dr-SO#workforce

Shift: Overall number of operational workers assigned to the shift
has domain
Shift c
has range
integer

Legend back to ToC

c: Classes
op: Object Properties
dp: Data Properties

References back to ToC

Add your references here. It is recommended to have them as a list.

Acknowledgments back to ToC

The authors would like to thank Silvio Peroni for developing LODE, a Live OWL Documentation Environment, which is used for representing the Cross Referencing Section of this document and Daniel Garijo for developing Widoco, the program used to create the template used in this documentation.